International Journal of Surface Science and Engineering (IJSurfSE) Inderscience Publishers - linking academia, business and industry through research

International Journal of Surface Science and Engineering

Special Issue on Advances in Intelligent Nano-Measurement Technology

Guest Editors: Dr. Wei Gao, Dr. Kiyoshi Takamasu, Dr. Yasuhiro Takaya and Dr. Satoru Takahashi

Pages	Title and author(s)
160-177	Evaluation of gear engagement accuracy by Transmission Error with sub-microradian resolution Syuhei Kurokawa, Yasutsune Ariura, Yoji Matsukawa, Toshiro Doi DOI: 10.1504/IJSURFSE.2009.026607
178-194	Study on residual resist layer thickness measurement for Nanoimprint Lithography based on near-field optics Satoru Takahashi, Shuichi Minamiguchi, Toshiyuki Nakao, Shin Usuki, Kiyoshi Takamasu DOI: 10.1504/IJSURFSE.2009.026608
195-207	Scanning in situ self-calibration method for the two-probe method of straightness measurement Yoshikazu Arai, Jung Chul Lee, Chun Hong Park DOI: 10.1504/IJSURFSE.2009.026609
208-226	Fundamental study on the position detection signal analysis for the fibre optical trapping probe S.I. Eom, T. Hayashi, Y. Takaya DOI: 10.1504/IJSURFSE.2009.026610
227-241	Improvement of a Fast Tool Control unit for cutting force measurement in diamond turning of micro-lens array Young Jin Noh, Yoshikazu Arai, Wei Gao DOI: 10.1504/IJSURFSE.2009.026611
242-252	Proposal of concurrent measurement method for spindle radial, axial and angular motions using concentric grating interferometers Muhummad Madden, Masato Aketagawa, Yuria Ohkubo, Shohei Kimura, Hideki Maruyama, Satoru Higuchi, Eiki Okuyama DOI: 10.1504/IJSURFSE.2009.026612
253-271	Precision positioning control of a Sawyer motor-based two-axis planar motion stage Songyi Dian, Yoshikazu Arai, Wei Gao DOI: 10.1504/IJSURFSE.2009.026613