
International Journal of Surface Science and Engineering
2009 Vol.3 No.3
Special Issue on Advances in Intelligent Nano-Measurement Technology
Guest Editors: Dr. Wei Gao, Dr. Kiyoshi Takamasu, Dr. Yasuhiro Takaya and Dr. Satoru Takahashi
Pages | Title and author(s) |
160-177 | Evaluation of gear engagement accuracy by Transmission Error with sub-microradian resolutionSyuhei Kurokawa, Yasutsune Ariura, Yoji Matsukawa, Toshiro Doi DOI: 10.1504/IJSURFSE.2009.026607 |
178-194 | Study on residual resist layer thickness measurement for Nanoimprint Lithography based on near-field opticsSatoru Takahashi, Shuichi Minamiguchi, Toshiyuki Nakao, Shin Usuki, Kiyoshi Takamasu DOI: 10.1504/IJSURFSE.2009.026608 |
195-207 | Scanning in situ self-calibration method for the two-probe method of straightness measurementYoshikazu Arai, Jung Chul Lee, Chun Hong Park DOI: 10.1504/IJSURFSE.2009.026609 |
208-226 | Fundamental study on the position detection signal analysis for the fibre optical trapping probeS.I. Eom, T. Hayashi, Y. Takaya DOI: 10.1504/IJSURFSE.2009.026610 |
227-241 | Improvement of a Fast Tool Control unit for cutting force measurement in diamond turning of micro-lens arrayYoung Jin Noh, Yoshikazu Arai, Wei Gao DOI: 10.1504/IJSURFSE.2009.026611 |
242-252 | Proposal of concurrent measurement method for spindle radial, axial and angular motions using concentric grating interferometersMuhummad Madden, Masato Aketagawa, Yuria Ohkubo, Shohei Kimura, Hideki Maruyama, Satoru Higuchi, Eiki Okuyama DOI: 10.1504/IJSURFSE.2009.026612 |
253-271 | Precision positioning control of a Sawyer motor-based two-axis planar motion stageSongyi Dian, Yoshikazu Arai, Wei Gao DOI: 10.1504/IJSURFSE.2009.026613 |