![International Journal of Nanomanufacturing (IJNM) International Journal of Nanomanufacturing (IJNM)](https://www.inderscience.com/images/cover/scoverijnm.jpg)
International Journal of Nanomanufacturing
2012 Vol.8 No.5/6
Special Issue on Precision Metrology for Micro- and Nanomanufacturing
Guest Editor: Professor Albert Weckenmann
![]() |
Special Issue on Precision Metrology for Micro- and Nanomanufacturing
Guest Editor: Professor Albert Weckenmann
![]() |