100 µm-size stationary spot machining in elastic emission machining
by Yoshinori Takei; Hidekazu Mimura
International Journal of Nanomanufacturing (IJNM), Vol. 10, No. 3, 2014

Abstract: Recently, by using various ultraprecision machining methods, optical devices having both nanometer-level figure accuracy and nanometer-level smoothness have become obtainable. However, improvement of the spatial resolution in figuring is still strongly required, particularly when the shape of optical devices is complicated. We have been developing a figure correction system using elastic emission machining (EEM). In this study, an EEM nozzle head having a minute aperture with a diameter of less than 60 µm was developed. The minute hole was prepared by micro-electrical discharge machining (EDM). A stationary spot profile with a diameter of 100 µm was experimentally obtained. Using the developed nozzle, spatial resolution better than 100 µm is expected to be realised in the EEM figuring system.

Online publication date: Sat, 17-May-2014

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