Authors: Yoshinori Takei; Hidekazu Mimura
Addresses: Department of Precision Engineering, Graduate School of Engineering, The University of Tokyo, Building 14 Room 833, 7-3-1, Hongo, Bunkyo-ku, Tokyo, 113-8656, Japan ' Department of Precision Engineering, Graduate School of Engineering, The University of Tokyo, Building 14 Room 833, 7-3-1, Hongo, Bunkyo-ku, Tokyo, 113-8656, Japan
Abstract: Recently, by using various ultraprecision machining methods, optical devices having both nanometer-level figure accuracy and nanometer-level smoothness have become obtainable. However, improvement of the spatial resolution in figuring is still strongly required, particularly when the shape of optical devices is complicated. We have been developing a figure correction system using elastic emission machining (EEM). In this study, an EEM nozzle head having a minute aperture with a diameter of less than 60 µm was developed. The minute hole was prepared by micro-electrical discharge machining (EDM). A stationary spot profile with a diameter of 100 µm was experimentally obtained. Using the developed nozzle, spatial resolution better than 100 µm is expected to be realised in the EEM figuring system.
Keywords: elastic emission machining; EEM; optical fabrication; smoothing; figuring; ultraprecision machining; spatial resolution; micro EDM; electrical discharge machining; electro-discharge machining; nanotechnology; stationary spot profile.
International Journal of Nanomanufacturing, 2014 Vol.10 No.3, pp.244 - 253
Received: 05 Nov 2012
Accepted: 19 Jul 2013
Published online: 30 Apr 2014 *