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Vol. 1

International Journal of Nanomanufacturing

2012 Vol. 8 No. 5/6

Special Issue on Precision Metrology for Micro- and Nanomanufacturing

Guest Editor: Professor Albert Weckenmann

 

Editorial
PagesTitle and authors
359-371Characterisation of structured geometry surface features on micro and nano scale surfaces
Liam Blunt; Paul J. Scott
DOI: 10.1504/IJNM.2012.051111

372-391Quantitative characterisation of nanoimprinted structures using metrological large range AFM and CDAFM
Gaoliang Dai; Hans-Ulrich Danzebrink; Jens Fluegge; Harald Bosse
DOI: 10.1504/IJNM.2012.051112

392-418Towards fast AFM-based nanometrology and nanomanufacturing
Georg Schitter; Juergen Steininger; Friedjof C.A. Heuck; Urs Staufer
DOI: 10.1504/IJNM.2012.051109

419-431Height measurement of single nanoparticles based on evanescent field modulation
Takayuki Kurihara; Ryuichi Sugimoto; Ryota Kudo; S. Takahashi; K. Takamasu
DOI: 10.1504/IJNM.2012.051105

432-440Real-time absolute distance measurement by comb-based generation of multiple wavelengths
Sangwon Hyun; Young-Jin Kim; Byung Jae Chun; Seung-Woo Kim
DOI: 10.1504/IJNM.2012.051107

441-449Micro and nano coordinate measuring technology with optical and tactile optical probes in high precision coordinate measuring machines
R. Christoph; I. Schmidt
DOI: 10.1504/IJNM.2012.051104

450-466Aspects of micro-tactile dynamic sensor tracking
Albert Weckenmann; Alexander Schuler
DOI: 10.1504/IJNM.2012.051113

467-483Surface and coordinate measurements with nanomeasuring machines
Tino Hausotte; Felix-Gerhard Balzer; Nataliya Vorbringer-Dorozhovets; Eberhard Manske
DOI: 10.1504/IJNM.2012.051110

484-492Scattered light sensor for chatter mark detection in nanometer scale
J. Seewig; M. Wendel
DOI: 10.1504/IJNM.2012.051106

493-507Assessment of machining with uncoated and coated end mills and determining surface topography using 2D fast Fourier transform
M.N. Durakbasa; P. Demircioglu; I. Bogrekci; G. Bas; A. Gunay
DOI: 10.1504/IJNM.2012.051108

508-521Evaluation of optical heterogeneity using phase-shift digital holography
Terutake Hayashi; Masaki Michihata; Yasuhiro Takaya
DOI: 10.1504/IJNM.2012.051114