Thermo-mechanical behaviour of a micromirror for laser-to-fibre active alignment using bimorphs with breakable tethers
by Hajime Kitagawa, David J. Boteler, Y.C. Lee
International Journal of Materials and Product Technology (IJMPT), Vol. 34, No. 1/2, 2009

Abstract: We will present a novel micromirror design in which tethered bimorph strips are used for mirror active alignment including beam steering and position fixing. A micromirror is attached to bimorphs that are prestressed at room temperature. A series of tethers link the bimorphs to the substrate to restrain their deformation. Breaking a tether by joule heating allows the deformation of the bimorph to increase, changing the mirror position and orientation for precision alignment. With a large number of tethers, an optimum alignment can be achieved after breaking a selected group of tethers. Experimental results of the devices fabricated confirm the beam steering and position fixing designed.

Online publication date: Sun, 04-Jan-2009

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