Thermo-mechanical behaviour of a micromirror for laser-to-fibre active alignment using bimorphs with breakable tethers
by Hajime Kitagawa, David J. Boteler, Y.C. Lee
International Journal of Materials and Product Technology (IJMPT), Vol. 34, No. 1/2, 2009

Abstract: We will present a novel micromirror design in which tethered bimorph strips are used for mirror active alignment including beam steering and position fixing. A micromirror is attached to bimorphs that are prestressed at room temperature. A series of tethers link the bimorphs to the substrate to restrain their deformation. Breaking a tether by joule heating allows the deformation of the bimorph to increase, changing the mirror position and orientation for precision alignment. With a large number of tethers, an optimum alignment can be achieved after breaking a selected group of tethers. Experimental results of the devices fabricated confirm the beam steering and position fixing designed.

Online publication date: Sun, 04-Jan-2009

The full text of this article is only available to individual subscribers or to users at subscribing institutions.

 
Existing subscribers:
Go to Inderscience Online Journals to access the Full Text of this article.

Pay per view:
If you are not a subscriber and you just want to read the full contents of this article, buy online access here.

Complimentary Subscribers, Editors or Members of the Editorial Board of the International Journal of Materials and Product Technology (IJMPT):
Login with your Inderscience username and password:

Username:        Password:          Forgotten your password?

Want to subscribe?
A subscription gives you complete access to all articles in the current issue, as well as to all articles in the previous three years (where applicable). See our Orders page to subscribe.

If you still need assistance, please email subs@inderscience.com