A differential confocal LG/LD SAW detection system to determine mechanical properties of layered thin films
by Maosen Bai; Xing Fu; Dante J. Dorantes; Baoyin Jin; Xiaotang Hu
International Journal of Nanomanufacturing (IJNM), Vol. 7, No. 3/4, 2011

Abstract: An improved laser generated and laser detected surface acoustic wave (LG/LD SAW) detection system with broad band response based on a differential confocal configuration has been developed to determine the Young's modulus of a layered structure formed of a thermal SiO2 film on a Si substrate. A dispersion curve with suitable measuring characteristics even at a high frequency range for this kind of measurements was obtained by the system. Fitting the curve processed experimentally with the one obtained by theoretical computation, yielded a value of Young's modulus within a satisfactory range, and estimated with a high resolution.

Online publication date: Sat, 07-Mar-2015

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