Title: A differential confocal LG/LD SAW detection system to determine mechanical properties of layered thin films

Authors: Maosen Bai; Xing Fu; Dante J. Dorantes; Baoyin Jin; Xiaotang Hu

Addresses: School of Precision Instruments and Opto-electronics Engineering, State Key Laboratory of Precision, Measuring Technology and Instruments, Tianjin University, 92 Weijin Rd., Tianjin 300072, China. ' School of Precision Instruments and Opto-electronics Engineering, State Key Laboratory of Precision, Measuring Technology and Instruments, Tianjin University, 92 Weijin Rd., Tianjin 300072, China. ' School of Precision Instruments and Opto-electronics Engineering, State Key Laboratory of Precision, Measuring Technology and Instruments, Tianjin University, 92 Weijin Rd., Tianjin 300072, China. ' School of Precision Instruments and Opto-electronics Engineering, State Key Laboratory of Precision, Measuring Technology and Instruments, Tianjin University, 92 Weijin Rd., Tianjin 300072, China. ' School of Precision Instruments and Opto-electronics Engineering, State Key Laboratory of Precision, Measuring Technology and Instruments, Tianjin University, 92 Weijin Rd., Tianjin 300072, China.

Abstract: An improved laser generated and laser detected surface acoustic wave (LG/LD SAW) detection system with broad band response based on a differential confocal configuration has been developed to determine the Young|s modulus of a layered structure formed of a thermal SiO2 film on a Si substrate. A dispersion curve with suitable measuring characteristics even at a high frequency range for this kind of measurements was obtained by the system. Fitting the curve processed experimentally with the one obtained by theoretical computation, yielded a value of Young|s modulus within a satisfactory range, and estimated with a high resolution.

Keywords: differential confocal; surface acoustic waves; Young|s modulus; layered thin films; dispersion curve; measuring resolution; acoustic wave detection; laser detection; nanomanufacturing; nanotechnology.

DOI: 10.1504/IJNM.2011.042473

International Journal of Nanomanufacturing, 2011 Vol.7 No.3/4, pp.311 - 326

Received: 15 Nov 2010
Accepted: 25 Mar 2011

Published online: 14 Sep 2011 *

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