Improvement of a Fast Tool Control unit for cutting force measurement in diamond turning of micro-lens array Online publication date: Sat, 20-Jun-2009
by Young Jin Noh, Yoshikazu Arai, Wei Gao
International Journal of Surface Science and Engineering (IJSURFSE), Vol. 3, No. 3, 2009
Abstract: This paper describes a Fast Tool Control (FTC) unit integrated with a piezoelectric force sensor, which is designed for in-process measurement of the cutting force during the fabrication of micro-lens array. The piezoelectric force sensor integrated with the FTC unit is designed to have a stroke of 48 μm, a bandwidth of 7837 Hz and a stiffness of 34.67 N/μm. The micro-lens array is fabricated with a length of 190 μm and a depth of 5.2 μm on the oxygen-free copper surface and the Ni–P plating surface. The measured cutting forces of the oxygen-free copper surface and the Ni–P plating surface were 0.54 N and 0.92 N, respectively. The cutting tool wear could be detected through monitoring the cutting force by developed FTC unit integrated with a piezoelectric force sensor.
Existing subscribers:
Go to Inderscience Online Journals to access the Full Text of this article.
If you are not a subscriber and you just want to read the full contents of this article, buy online access here.Complimentary Subscribers, Editors or Members of the Editorial Board of the International Journal of Surface Science and Engineering (IJSURFSE):
Login with your Inderscience username and password:
Want to subscribe?
A subscription gives you complete access to all articles in the current issue, as well as to all articles in the previous three years (where applicable). See our Orders page to subscribe.
If you still need assistance, please email subs@inderscience.com