Title: Improvement of a Fast Tool Control unit for cutting force measurement in diamond turning of micro-lens array

Authors: Young Jin Noh, Yoshikazu Arai, Wei Gao

Addresses: Nanosystems Engineering Laboratory, Faculty of Engineering, Department of Nanomechanics, Tohoku University, Aramaki-Aza Aoba 6-6-01, Aoba-ku, Sendai 980-8579, Japan. ' Nanosystems Engineering Laboratory, Faculty of Engineering, Department of Nanomechanics, Tohoku University, Aramaki-Aza Aoba 6-6-01, Aoba-ku, Sendai 980-8579, Japan. ' Nanosystems Engineering Laboratory, Faculty of Engineering, Department of Nanomechanics, Tohoku University, Aramaki-Aza Aoba 6-6-01, Aoba-ku, Sendai 980-8579, Japan

Abstract: This paper describes a Fast Tool Control (FTC) unit integrated with a piezoelectric force sensor, which is designed for in-process measurement of the cutting force during the fabrication of micro-lens array. The piezoelectric force sensor integrated with the FTC unit is designed to have a stroke of 48 μm, a bandwidth of 7837 Hz and a stiffness of 34.67 N/μm. The micro-lens array is fabricated with a length of 190 μm and a depth of 5.2 μm on the oxygen-free copper surface and the Ni–P plating surface. The measured cutting forces of the oxygen-free copper surface and the Ni–P plating surface were 0.54 N and 0.92 N, respectively. The cutting tool wear could be detected through monitoring the cutting force by developed FTC unit integrated with a piezoelectric force sensor.

Keywords: fast tool control unit; piezoelectric force sensors; in-process measurement; diamond turning; micro-lens array; cutting force measurement; tool wear; tool monitoring; wear monitoring.

DOI: 10.1504/IJSURFSE.2009.026611

International Journal of Surface Science and Engineering, 2009 Vol.3 No.3, pp.227 - 241

Published online: 20 Jun 2009 *

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