Title: Properties of Al-doped ZnO thin films grown by pulsed laser deposition on Si(100) substrates

Authors: Fouad Kermiche; Adel Taabouche; Faouzi Hanini; Sarah Menakh; Abderrahmane Bouabellou; Yacine Bouachiba; Tahar Kerdja; Chawki Benazzouz; Mohamed Bouafia; Saad Amara

Addresses: Laboratoire Couches Minces – Interfaces, Department of Physics, Université Mentouri Constantine, 25000, Algeria ' Laboratoire Couches Minces – Interfaces, Department of Physics, Université Mentouri Constantine, 25000, Algeria ' Laboratoire Couches Minces – Interfaces, Department of Physics, Université Mentouri Constantine, 25000, Algeria ' Laboratoire Couches Minces – Interfaces, Department of Physics, Université Mentouri Constantine, 25000, Algeria ' Laboratoire Couches Minces – Interfaces, Department of Physics, Université Mentouri Constantine, 25000, Algeria ' Laboratoire Couches Minces – Interfaces, Department of Physics, Université Mentouri Constantine, 25000, Algeria ' Centre de Développement des Techniques Avancées, Baba-Hassen, Alger 16000, Algérie ' Centre CRNA, 2 Bd Franz Fanon, Alger 16000, Algérie ' Département d'Optique et de Mécanique de Précésion, Université de Sétif, 19000, Algérie ' Département d'Optique et de Mécanique de Précésion, Université de Sétif, 19000, Algérie

Abstract: Undoped and Al-doped ZnO (AZO) polycrystalline thin films (Al: 3, 5 at.%) have been deposited at 450°C onto Si(100) substrates by pulsed laser deposition method. A KrF excimer (248 nm, 25 ns, 2 J/cm²) was used as laser source. The study of the obtained undoped and Al-doped ZnO thin films has been accomplished using X-ray diffraction (XRD), atomic force microscopy (AFM) and Rutherford backscattering spectrometry (RBS) techniques. The ZnO and AZO thin films deposited have been crystallised in hexagonal wurtzite-type structure with a strong (00.2) orientation. The grain sizes calculated from XRD patterns decrease from 38 to 26 nm with increasing Al doping. All nanoparticle thin films have a good surface morphology.

Keywords: ZnO; zinc oxide; aluminium; Al doping; pulsed laser deposition; PLD; X-ray diffraction; XRD; atomic force microscopy; AFM; Rutherford backscattering spectrometry; RBS; nanoparticles; silicon substrates; polycrystalline thin films; grain sizes; nanotechnology.

DOI: 10.1504/IJNP.2013.054984

International Journal of Nanoparticles, 2013 Vol.6 No.2/3, pp.93 - 102

Published online: 21 Jun 2013 *

Full-text access for editors Access for subscribers Purchase this article Comment on this article