Title: Robust control of micro-positioning stage with piezoceramic actuator

Authors: Yonghong Tan; Yangqiu Xie; Ruili Dong; Hong He

Addresses: College of Mechanical and Electronic Engineering, Shanghai Normal University, #100 Guilin Road, Shanghai 200234, China ' School of Electronic Engineering, Xi'dian University, #2, South Taibai Street, Xi’an 710071, China ' College of Mechanical and Electronic Engineering, Shanghai Normal University, #100 Guilin Road, Shanghai 200234, China ' College of Mechanical and Electronic Engineering, Shanghai Normal University, #100 Guilin Road, Shanghai 200234, China

Abstract: A non-linear robust control strategy for piezoceramic actuator in a micro-positioning stage is proposed in this paper. In order to describe the relations among the amplifier-filter circuit, piezoceramic actuator and load, a sandwich model with hysteresis is developed. For the compensation of hysteresis effect in piezoceramic actuator, the corresponding inverse model of hysteresis is constructed. Then, a non-linear robust control strategy based on the sandwich model with hysteresis is proposed. The experimental results show that the proposed control scheme has obtained promising results.

Keywords: robust control; piezoceramic actuators; hysteresis; micropositioning; nonlinear control; inverse modelling; sandwich models.

DOI: 10.1504/IJAMECHS.2012.052216

International Journal of Advanced Mechatronic Systems, 2012 Vol.4 No.5/6, pp.221 - 229

Published online: 30 Aug 2014 *

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