Robust control of micro-positioning stage with piezoceramic actuator
by Yonghong Tan; Yangqiu Xie; Ruili Dong; Hong He
International Journal of Advanced Mechatronic Systems (IJAMECHS), Vol. 4, No. 5/6, 2012

Abstract: A non-linear robust control strategy for piezoceramic actuator in a micro-positioning stage is proposed in this paper. In order to describe the relations among the amplifier-filter circuit, piezoceramic actuator and load, a sandwich model with hysteresis is developed. For the compensation of hysteresis effect in piezoceramic actuator, the corresponding inverse model of hysteresis is constructed. Then, a non-linear robust control strategy based on the sandwich model with hysteresis is proposed. The experimental results show that the proposed control scheme has obtained promising results.

Online publication date: Sat, 30-Aug-2014

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