Authors: Songyi Dian, Yoshikazu Arai, Wei Gao
Addresses: Nano-Metrology and Control Laboratory, School of Engineering, Department of Nanomechanics, Tohoku University, Sendai 980-8579, Japan; School of Electrical and Information, Department of Automation, Sichuan University, Chengdu 610065, China. ' Nano-Metrology and Control Laboratory, Department of Nanomechanics, School of Engineering, Tohoku University, Sendai 980-8579, Japan. ' Nano-Metrology and Control Laboratory, Department of Nanomechanics, School of Engineering, Tohoku University, Sendai 980-8579, Japan
Abstract: A Sawyer motor-based planar motion stage has good open-loop positioning resolution, rapid acceleration and high speed. When operated in the open-loop mode, however, thrust ripple which mainly due to the cogging force at low moving speed, deteriorates the positioning performance. This paper describes the control strategy of a Sawyer motor-driven XY planar motion stage, in which an effective closed-loop control based on micro-stepping drive is designed. A scheme derived from Sliding Mode Observer (SMO) is used for cogging force compensation. The results of experiment have verified the effectiveness of suggested control strategies and tracking performance of the planar motion stage.
Keywords: Sawyer motor; motion control; precision positioning; SMO; sliding-mode observer; positioning control; thrust ripple; planar motion; cogging force compensation; tracking performance.
International Journal of Surface Science and Engineering, 2009 Vol.3 No.3, pp.253 - 271
Published online: 20 Jun 2009 *Full-text access for editors Access for subscribers Purchase this article Comment on this article