Title: Fundamental study on the position detection signal analysis for the fibre optical trapping probe

Authors: S.I. Eom, T. Hayashi, Y. Takaya

Addresses: Department of Mechanical Engineering and System, Osaka University, 2-1, Yamadaoka, Suita, Osaka 565-0871, Japan. ' Department of Mechanical Engineering and System, Osaka University, 2-1, Yamadaoka, Suita, Osaka 565-0871, Japan. ' Department of Mechanical Engineering and System, Osaka University, 2-1, Yamadaoka, Suita, Osaka 565-0871, Japan

Abstract: In this study, a novel touch probe for measuring three-dimensional (3D) microcomponents with a high aspect ratio is proposed. By this technique, a dielectric microsphere is optically trapped using an optical fibre and used as a touch probe. To use the trapped microsphere as the touch probe sphere, the intensity of reentering light that is reflected from the surface of a microsphere is sensed as a position detection signal. When the probe is in contact with the surface of an object, the intensity of the reentered light changes and this change is used as the position detection signal. A method for detecting the touch of the probe sphere by using the sensed signal is also analysed in this study.

Keywords: laser trapping; fibre optical trapping; nano-CMMs; probing techniques; position detection; signal analysis; touch probes; 3D microcomponents; high aspect ratio; microcomponent measurement; dielectric microspheres; coordinate measuring machines.

DOI: 10.1504/IJSURFSE.2009.026610

International Journal of Surface Science and Engineering, 2009 Vol.3 No.3, pp.208 - 226

Published online: 20 Jun 2009 *

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