Title: Scanning in situ self-calibration method for the two-probe method of straightness measurement
Authors: Yoshikazu Arai, Jung Chul Lee, Chun Hong Park
Addresses: Nano-Metrology and Control Laboratory, Department of Nanomechanics, School of Engineering, Tohoku University, Aramaki-Aza Aoba 6-6-01, Aoba-ku, Sendai 980-8579, Japan. ' Nano-Metrology and Control Laboratory, Department of Nanomechanics, School of Engineering, Tohoku University, Aramaki-Aza Aoba 6-6-01, Aoba-ku, Sendai 980-8579, Japan. ' Korea Institute of Machinery and Materials (KIMM), 104 Sinseongno, Yusung-gu, Daejeon 305-343, Korea
Abstract: When using the software datum to exceed the accuracy limit by the hardware datum of surface profile measurement, the calibration accuracy of the sensor becomes an important factor. A sensor self-calibration method is presented in this paper. This method is specifically developed for in situ calibration of the sensors used in the two-probe method for construction of software datum of surface profile measurement, in which two displacement probes are employed to separate the surface profile from the scanning error motion. This method has the advantage of being insensitive to the sensor setting error and the repeatability of the scanning reference. Principle of the in situ self-calibration method and results of measurement experiment are described.
Keywords: self-calibration; two-probe method; software datum; in situ calibration; linearity error; displacement sensors; straightness measurement; scanning; calibration accuracy; surface profile measurement.
International Journal of Surface Science and Engineering, 2009 Vol.3 No.3, pp.195 - 207
Published online: 20 Jun 2009 *Full-text access for editors Access for subscribers Purchase this article Comment on this article