Title: Nanomachining Zr-based metallic glass surfaces using an atomic force microscope

Authors: Noritaka Kawasegi, Noboru Morita, Shigeru Yamada, Noboru Takano, Tatsuo Oyama, Kiwamu Ashida, Hitoshi Ofune

Addresses: Graduate School of Science and Engineering, University of Toyama, 3190 Gofuku, Toyama 930-8555, Japan. ' Graduate School of Science and Engineering for Research, University of Toyama, 3190 Gofuku, Toyama 930-8555, Japan. ' Graduate School of Science and Engineering for Research, University of Toyama, 3190 Gofuku, Toyama 930-8555, Japan. ' Graduate School of Science and Engineering for Research, University of Toyama, 3190 Gofuku, Toyama 930-8555, Japan. ' Department of Mechanical and Intellectual Systems Engineering, University of Toyama, 3190 Gofuku, Toyama 930-8555, Japan. ' Advanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and Technology, 1-2-1 Namiki, Tsukuba Ibaraki 305-8564, Japan. ' YKK Corporation, 200 Yoshida, Kurobe, Toyama 938-8601, Japan

Abstract: This study investigated the nanomachining of metallic glass surfaces using an Atomic Force Microscope (AFM). To reveal the nanomachining characteristics of metallic glass, machining experiments were conducted under various machining parameters. The metallic glass was machined to fabricate an 8-nm-deep by 120-nm-wide groove pattern. It was found that metallic glass is a more challenging material to machine than single-crystal silicon. The tool life is significantly shorter, although it can be improved somewhat by machining in water. Observation of the machining residue revealed that continuous and shear cutting chips were generated that differed from those generated by machining amorphous silicon.

Keywords: metallic glass; nanomachining; atomic force microscope; AFM; cantilever; nanomanufacturing; glass machining; nanotechnology; nanofabrication; amorphous alloys; ultraprecision machining.

DOI: 10.1504/IJMMM.2007.012663

International Journal of Machining and Machinability of Materials, 2007 Vol.2 No.1, pp.3 - 16

Published online: 06 Mar 2007 *

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