Nanomachining Zr-based metallic glass surfaces using an atomic force microscope
by Noritaka Kawasegi, Noboru Morita, Shigeru Yamada, Noboru Takano, Tatsuo Oyama, Kiwamu Ashida, Hitoshi Ofune
International Journal of Machining and Machinability of Materials (IJMMM), Vol. 2, No. 1, 2007

Abstract: This study investigated the nanomachining of metallic glass surfaces using an Atomic Force Microscope (AFM). To reveal the nanomachining characteristics of metallic glass, machining experiments were conducted under various machining parameters. The metallic glass was machined to fabricate an 8-nm-deep by 120-nm-wide groove pattern. It was found that metallic glass is a more challenging material to machine than single-crystal silicon. The tool life is significantly shorter, although it can be improved somewhat by machining in water. Observation of the machining residue revealed that continuous and shear cutting chips were generated that differed from those generated by machining amorphous silicon.

Online publication date: Tue, 06-Mar-2007

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