Forthcoming Articles

International Journal of Abrasive Technology

International Journal of Abrasive Technology (IJAT)

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International Journal of Abrasive Technology (One paper in press)

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  • An experimental study of the hybrid femtosecond laser-waterjet micromachining process for monocrystalline GaN   Order a copy of this article
    by Zhihao Chen, Dalin Guo, Zhenyu Liu, Jun Wang 
    Abstract: Monocrystalline gallium nitride (GaN) has excellent properties for micro-device applications, but its high hardness, brittleness, and optical transparency make high-quality micromachining still challenging. This study investigates the hybrid femtosecond laser-waterjet micromachining of GaN substrates. It is found that the machined microgrooves are exceptionally clean without recast layers, while high-quality laser-induced periodic surface structures (LIPSS) are identified within the machined areas. Despite some slight heat-affected zone (HAZ) and oxidation, the processed GaNs material crystal structure remains unchanged. The effect of key process parameters upon the machining performance is thoroughly discussed. It is shown that laser pulse energy and focal plane position are positively correlated with the microgroove depth and top width and material removal rate (MRR), while the effect of laser pulse overlap and water pressure are more complex whereby MRR and groove top width show a peak turning point respectively with these two specific process variables. Under the experimental conditions, the combination of 99.95% laser pulse overlap, 40 J laser pulse energy, 0 mm focal plane position and 5 MPa water pressure yields the maximum microgroove depth of 150.376 m. The findings offer practical guidance and theoretical foundation for the high-efficiency and high-quality micromachining of GaN substrates.
    Keywords: hybrid machining; micromachining; laser-waterjet; femtosecond laser; GaN.
    DOI: 10.1504/IJAT.2026.10079414
     

 

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