A new approach to fabricate micro lens array using fast tool servo
by Jingbo Zhou; Tao Sun; Wenjun Zong
International Journal of Nanomanufacturing (IJNM), Vol. 7, No. 5/6, 2011

Abstract: Diamond turning with fast tool servo (FTS) is one of the most promising techniques for micro lens array (MLA) fabrication. Using this method, MLA with sub-micrometer form accuracy and nanometre surface finishing can be fabricated with the advantage of low cost and high efficiency. This paper presents the turning mechanism of non-rotational surface based on the numerical control system where the displacement of FTS is online calculated according to both the position of X-slider and the rotated angle of spindle. A novel tool path generating algorithm with high efficiency is developed and the tool nose radius compensation method is also proposed. Experiment has been conducted and well arranged micro lenses with high form accuracy and good surface finishing are obtained.

Online publication date: Sat, 07-Mar-2015

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