Title: A new approach to fabricate micro lens array using fast tool servo

Authors: Jingbo Zhou; Tao Sun; Wenjun Zong

Addresses: Centre for Precision Engineering (CPE), Harbin Institute of Technology, P.O. Box 413, Harbin, China. ' Centre for Precision Engineering (CPE), Harbin Institute of Technology, P.O. Box 413, Harbin, China. ' Centre for Precision Engineering (CPE), Harbin Institute of Technology, P.O. Box 413, Harbin, China

Abstract: Diamond turning with fast tool servo (FTS) is one of the most promising techniques for micro lens array (MLA) fabrication. Using this method, MLA with sub-micrometer form accuracy and nanometre surface finishing can be fabricated with the advantage of low cost and high efficiency. This paper presents the turning mechanism of non-rotational surface based on the numerical control system where the displacement of FTS is online calculated according to both the position of X-slider and the rotated angle of spindle. A novel tool path generating algorithm with high efficiency is developed and the tool nose radius compensation method is also proposed. Experiment has been conducted and well arranged micro lenses with high form accuracy and good surface finishing are obtained.

Keywords: diamond turning; micro lens array; MLA fabrication; tool path generation; tool nose radius compensation; fast tool servo; FTS; NC tool paths; form accuracy; surface finish.

DOI: 10.1504/IJNM.2011.043683

International Journal of Nanomanufacturing, 2011 Vol.7 No.5/6, pp.475 - 487

Received: 12 Nov 2010
Accepted: 11 Mar 2011
Published online: 07 Mar 2015 *

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