Micro drilling of PMMA with double-pulse femtosecond laser
by Jiaqun Li; Hongfei Shang; Jianfeng Yan; Ming Qiao; Jiachen Yu; Dezhi Zhu; Chao He
International Journal of Hydromechatronics (IJHM), Vol. 6, No. 1, 2023

Abstract: Micro holes drilling in polymers have a variety of applications in industry and research. Especially, the fabrication of micro hole with high aspect ratio is a key technology for advanced applications. In this work, we report an improvement in drilling on poly-methyl methacrylate (PMMA) by using double-pulse femtosecond laser. Compared to single pulse, the achievable depth by double pulses can be increased by 50% when the pulse delay is 100 fs and gradually decreases with delay increasing. The depth evolution with the increasing of pulse number is investigated. When the micro hole depth reaches a certain value, the processing speed of double pulse is less restricted than single pulse. Furthermore, the relationship between the depth improvement and electrons decay together with absorption increase is studied.

Online publication date: Tue, 21-Feb-2023

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