Title: Temperature effect on structural, optical and NH3 gas sensing properties of TeO2 thin films

Authors: M. Manouchehrian

Addresses: Department of Physics, South Tehran Branch, Islamic Azad University, Tehran, Iran

Abstract: TeO2 thin films with different temperatures (400, 450 and 500°C) were deposited on glass substrates by thermal evaporation technique from a Te powder. XRD patterns indicate that as the temperature increases, the crystallisation improves. Observing the images obtained by SEM, it is seen that the grain size decreases as the temperature increases. The optical energy gap of the films was determined from transmittance and reflectance spectra. The optical energy gap decreased continuously from 3.95 eV to 3.80 eV with increasing temperature. Studying the effect of deposition temperature on NH3 gas measurement, it became obvious that as the deposition temperature increases, the sensitivity increases and the response and recovery times decrease.

Keywords: thin films; optical; energy gap; sensitivity; X-ray diffraction; XRD; scanning electron microscope; SEM.

DOI: 10.1504/IJMSI.2017.087343

International Journal of Materials and Structural Integrity, 2017 Vol.11 No.1/2/3, pp.51 - 61

Available online: 28 Sep 2017 *

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