Title: In-situ infrared detection and heating of metallic phase of silicon during scratching test

Authors: Lei Dong, John A. Patten, Jimmie A. Miller

Addresses: Centre for Precision Metrology, University of North Carolina at Charlotte, Charlotte, NC 28223, USA. ' Manufacturing Research Centre, Western Michigan University, Kalamazoo, MI 49008, USA. ' Centre for Precision Metrology, University of North Carolina at Charlotte, Charlotte, NC 28223, USA

Abstract: A new method of in-situ detection of the high pressure phase transformation of silicon during dead-load scratching is described. The method is based on the simple fact that single crystal silicon is transparent to infrared light while metallic materials are not. Infrared heating during scratching has also been performed to thermally soften and deform the transformed metallic material and some promising results were obtained. The sample material used here is silicon, but the same approach can be applied to germanium and other materials, such as ceramics (SiC), which have appropriate optical properties.

Keywords: metallic phase; high pressure phase transformation; infrared detection; infrared heating; silicon; laser heating; semiconductor manufacturing; scratching test; dead-load scratching; germanium; ceramics; silicon carbide.

DOI: 10.1504/IJMTM.2005.007701

International Journal of Manufacturing Technology and Management, 2005 Vol.7 No.5/6, pp.530 - 539

Published online: 02 Sep 2005 *

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