Title: A study on optical, morphological and mechanical properties of Al2O3 ultra-thin films deposited by RF reactive magnetron sputtering

Authors: Suat Pat; Soner Özen; Volkan Şenay; Tuna Aydoğmuş; Saliha Elmas; Şadan Korkmaz; Naci Ekem; M. Zafer Balbağ

Addresses: Physics Department, Eskisehir Osmangazi University, 26480, Turkey ' Physics Department, Eskisehir Osmangazi University, 26480, Turkey ' Primary Science Education Department, Bayburt University, 69000, Turkey ' Physics Department, Eskisehir Osmangazi University, 26480, Turkey ' Physics Department, Eskisehir Osmangazi University, 26480, Turkey ' Physics Department, Eskisehir Osmangazi University, 26480, Turkey ' Physics Department, Eskisehir Osmangazi University, 26480, Turkey ' Physics Department, Eskisehir Osmangazi University, 26480, Turkey

Abstract: The Al2O3 ultra-thin films with the thicknesses of 30 nm and 35 nm were deposited on glass microscope slides by a radio frequency reactive magnetron sputtering system. The optical, morphological and mechanical properties were investigated as function of the film thickness. The refractive index of the resulting Al2O3 ultra-thin film increased with the increasing thickness. Both the films showed high transparency of > 85% and low reflectivity of < 10% in the visible and near infrared region. A band gap of ∼8.65 eV was obtained for the 30 nm film and ∼7.53 eV for the 35 nm film from an empirical relation between refractive index and band gap. According to the results obtained from the AFM studies, the root mean square surface roughness of the films are 3.67 nm and 3.77 nm for the 30 nm and 35 nm film, respectively. The hardness and Young modulus values decreased with the increasing film thickness.

Keywords: Al2O3 ultra-thin films; alumina; aluminium oxide; optical properties; RF magnetron sputtering; AFM; thin film deposition; morphological properties; mechanical properties; film thickness; surface roughness; surface quality; hardness; Young's modulus.

DOI: 10.1504/IJSURFSE.2015.072061

International Journal of Surface Science and Engineering, 2015 Vol.9 No.5, pp.415 - 424

Available online: 30 Sep 2015

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