Title: Effect of substrate temperature on mechanical properties of SiCO thin film

Authors: Miao Zhang; Ningbo Liao; Jie Shen; Wei Xue

Addresses: Jiangsu University, 301 Xuefu Rd, Jingkou, Zhenjiang, Jiangsu, China ' School of Mechanical and Electrical Engineering, Wenzhou University, Wenzhou 325035, China ' School of Mechanical and Electrical Engineering, Wenzhou University, Wenzhou 325035, China ' School of Mechanical and Electrical Engineering, Wenzhou University, Wenzhou 325035, China

Abstract: In this study, unbalanced magnetron sputtering approach was used to prepare silicon oxycarbide (SiCO) ceramics in the form of thin film. The SiCO thin films were synthesised by reactive radio-frequency sputtering with a SiC target and oxygen gas. Nano-indentation and scratch test were used to study the mechanical properties of SiCO film at different substrate temperatures. An optimal temperature was proposed by analysing Young's modulus, surface roughness and adhesion strength.

Keywords: SiCO thin films; magnetron sputter; mechanical properties; adhesion strength; scratch tests; nanoindentation; substrate temperature; silicon oxycarbide; SiCO ceramics; Young's modulus; surface roughness.

DOI: 10.1504/IJMSI.2015.071115

International Journal of Materials and Structural Integrity, 2015 Vol.9 No.1/2/3, pp.144 - 150

Published online: 12 Aug 2015 *

Full-text access for editors Full-text access for subscribers Purchase this article Comment on this article