Effect of substrate temperature on mechanical properties of SiCO thin film
by Miao Zhang; Ningbo Liao; Jie Shen; Wei Xue
International Journal of Materials and Structural Integrity (IJMSI), Vol. 9, No. 1/2/3, 2015

Abstract: In this study, unbalanced magnetron sputtering approach was used to prepare silicon oxycarbide (SiCO) ceramics in the form of thin film. The SiCO thin films were synthesised by reactive radio-frequency sputtering with a SiC target and oxygen gas. Nano-indentation and scratch test were used to study the mechanical properties of SiCO film at different substrate temperatures. An optimal temperature was proposed by analysing Young's modulus, surface roughness and adhesion strength.

Online publication date: Wed, 12-Aug-2015

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