Authors: Ziyue Wang; Shinji Wakui; Yukinori Nakamura
Addresses: Tokyo University of Agriculture and Technology, Naka-cho, 2–24-16 Koganei-shi, Tokyo, Japan ' Institute of Engineering, Tokyo University of Agriculture and Technology, Naka-cho, 2–24-16 Koganei-shi, Tokyo, Japan ' Institute of Engineering, Tokyo University of Agriculture and Technology, Naka-cho, 2–24-16 Koganei-shi, Tokyo, Japan
Abstract: In the field of precision positioning and measurement, an air-type anti-vibration apparatus is widely used. In order to levitate an isolated table and increase the damping, a position sensor and an acceleration sensor are mounted on the anti-vibration apparatus. The pressure sensor is also utilised for the pressure feedback control, which improves the transmissibility. In the implementation of pressure feedback, the high-resolution pressure sensor is needed. It is, however, expensive. To solve this problem, one approach is to use the observer instead of the pressure sensor. By using the theory of observer, we can choose the pole to determine the convergence of observer. Therefore, in this paper, we investigate effects of parameters of the observer with different pole assignment. The parameters are tuned by considering the frequency characteristics of the anti-vibration apparatus.
Keywords: anti-vibration apparatus; minimal order observer; pressure estimation; feedback control; pressure shaping; air spring type; position sensors; acceleration sensors; pole assignment; vibration.
International Journal of Advanced Mechatronic Systems, 2015 Vol.6 No.2/3, pp.84 - 97
Received: 25 Nov 2014
Accepted: 17 Mar 2015
Published online: 20 Jul 2015 *