Title: Some issues in surface and form metrology

Authors: David J. Whitehouse

Addresses: School of Engineering, University of Warwick, Coventry CV4 7AL, UK; Taylor Hobson Ltd., Leicester LE4 9JQ, UK

Abstract: There have been many advances in surface technology over the past few years - not all of them fully understood. This paper highlights some of them and discusses them in some detail. The topics chosen range from the broad problem of quality control involving surface metrology to how the traditional roles of workpiece geometry are changing in time and with the scale of size. Finally, some focus is given to the use of mathematics in enhancing instrument performance, in processing surface signals and even in characterising surface integrity.

Keywords: surface metrology; surface analysis; Laplace-Beltrami operator; surface-form; quality control; mathematics; instrument performance; surface integrity; form metrology.

DOI: 10.1504/IJPTECH.2013.057051

International Journal of Precision Technology, 2013 Vol.3 No.3, pp.223 - 243

Available online: 06 Oct 2013 *

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