Title: Characterisation of TCO AZO/glass structures by spectroscopic ellipsometry

Authors: Saâd Amara; Mohamed Bouafia

Addresses: Laboratory of Applied Optics, Institute of Optics and Precision Mechanics, Ferhat Abbas University, El Maâboda, Setif, 19000, Algeria ' Laboratory of Applied Optics, Institute of Optics and Precision Mechanics, Ferhat Abbas University, El Maâboda, Setif, 19000, Algeria

Abstract: Transparent conducting oxides (TCOs) are integral part of modern optoelectronics, among them: the ZnO doped aluminium (AZO). In this work, thin film of AZO was deposited on corning glass substrate using a magnetron sputtering method. The main study of optical and electric properties is made while employing the spectroscopic ellipsometry, because it is a very significant and precise method. The obtained values of the refractive index and permitivities showed the quality of the deposits and the depolarisation measurements confirmed the results obtained by AFM concerning the uniformity of AZO/glass structures. The transmission spectrum was allowed to have information about the behaviour of the transparence versus the wavelength.

Keywords: Al doping; aluminium; zinc oxide; ZnO; spectroscopic ellipsometry; transparent conducting oxides; TCO; transmission; dielectric permittivity; nanoparticles; nanotechnology; optoelectronics; thin films.

DOI: 10.1504/IJNP.2013.054987

International Journal of Nanoparticles, 2013 Vol.6 No.2/3, pp.122 - 131

Published online: 25 Jun 2013 *

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