Title: A focused review on nanoscratching-induced deformation of monocrystalline silicon

Authors: Yueqin Wu; Han Huang; Jin Zou

Addresses: School of Mechanical and Mining Engineering, The University of Queensland, QLD 4072, Australia ' School of Mechanical and Mining Engineering, The University of Queensland, QLD 4072, Australia ' School of Mechanical and Mining Engineering, The University of Queensland, QLD 4072, Australia; Centre for Microscopy and Microanalysis, The University of Queensland, QLD 4072, Australia

Abstract: This focused review includes two parts. In the first part, the previous studies on the deformations of monocrystalline Si induced by nanoscratching were summarised. In the second part, our recent studies on the scratching-induced deformation of Si were systematically presented. The studies have demonstrated that lateral force in nanoscratching plays a key role in the amorphisation and phase transformation of Si under mechanical loading. The deformation route of Si appears to be different from those reported from the nanoindentation studies.

Keywords: nanoscrathing; deformation; monocrystalline silicon; transmission electron microscopy; phase transformation; amorphisation; nanotechnology; mechanical loading.

DOI: 10.1504/IJSURFSE.2013.051918

International Journal of Surface Science and Engineering, 2013 Vol.7 No.1, pp.51 - 80

Available online: 05 Feb 2013 *

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