Title: Aspects of micro-tactile dynamic sensor tracking

Authors: Albert Weckenmann; Alexander Schuler

Addresses: Chair Quality Management and Manufacturing Metrology (QFM), University Erlangen-Nuremberg, Nägelsbachstr. 25, 91052 Erlangen, Germany ' Chair Quality Management and Manufacturing Metrology (QFM), University Erlangen-Nuremberg, Nägelsbachstr. 25, 91052 Erlangen, Germany

Abstract: To reduce measurement deviations of tactile surface measurement systems resulting from high surface angles, a probing principle is investigated based on a dynamic surface slope dependent sensor tip rotation. To research the principle, a simulation environment and methods to calculate an optimal tip rotation angle are developed. The achievable deviation reduction of the principle and the performance of the different angle determination methods are examined based on different sample surfaces. In support of a hardware realisation, parameters of a virtual rotation system are varied, its effectiveness is quantified and the limits are identified.

Keywords: profilometry; measurement deviation; simulation; micro-tactile sensors; dynamic sensor tracking; tactile surface measurement; high surface angles; sensor tip rotation.

DOI: 10.1504/IJNM.2012.051113

International Journal of Nanomanufacturing, 2012 Vol.8 No.5/6, pp.450 - 466

Received: 20 Mar 2012
Accepted: 21 Sep 2012

Published online: 21 Aug 2014 *

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