Title: Fabricating microstructures on CVD diamond film

Authors: Choung-Lii Chao; Wen-Chen Chou; Wen-Chung Lin; Wei-Jhe Su; Kung-Jeng Ma

Addresses: Department of Mechanical and Electro-Mechanical Engineering, Tam-Kang University, No.151, Yingzhuan Rd. Danshui Dist., New Taipei City 25137, Taiwan. ' Department of Mechanical and Electro-Mechanical Engineering, Tam-Kang University, No.151, Yingzhuan Rd. Danshui Dist., New Taipei City 25137, Taiwan. ' Department of Mechanical and Electro-Mechanical Engineering, Tam-Kang University, No.151, Yingzhuan Rd. Danshui Dist., New Taipei City 25137, Taiwan. ' Department of Mechanical and Electro-Mechanical Engineering, Tam-Kang University, No.151, Yingzhuan Rd. Danshui Dist., New Taipei City 25137, Taiwan. ' Department of Mechanical Engineering, Chung-Hua University, No.707, Sec.2, WuFu Rd., Hsinchu, 30012, Taiwan

Abstract: Diamond has many advanced properties which may provide potential solutions to various engineering problems. This study focuses on fabricating micro-structures on CVD diamond film. A thin layer of Au or Pt together with thermal annealing process is used to form micro-masks and reactive ion etching (RIE) method was subsequently adopted in this research to etch and fabricate micro-structures. Field emission scanning electron microscope (FESEM) and micro Raman spectroscopy were used to observe and analyse the morphology and composition of the obtained microstructures. Results show that different coated materials and thickness can produce different types of micro-masks and, as a consequence, different microstructures. Depending on the micro-mask, whisker-like or pillar-like microstructures are successfully produced and, based on the micro Raman spectrum; these microstructures still retains good diamond quality.

Keywords: CVD diamond film; thermal annealing; reactive ion etching; RIE; microstructure.

DOI: 10.1504/IJSURFSE.2012.046842

International Journal of Surface Science and Engineering, 2012 Vol.6 No.1/2, pp.59 - 70

Received: 08 May 2021
Accepted: 12 May 2021

Published online: 11 May 2012 *

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