Title: The effect of substrate and processing conditions on the properties of sol-gel derived Pb(Zr,Ti)O3 thin films

Authors: Ebru Menşur Alkoy; Sedat Alkoy; Tadashi Shiosaki

Addresses: Faculty of Engineering, Maltepe University, 34857, Istanbul, Turkey. ' Department of Materials Science and Engineering, Gebze Institute of Technology, 41400, Kocaeli, Turkey. ' Graduate School of Materials Science, Nara Institute of Science and Technology, Ikoma, Nara 630-0192, Japan

Abstract: Lead zirconate titanate Pb(Zr0.45Ti0.55)O3 PZT thin films were prepared by sol-gel method on Pt(111)/Ti/SiO2/Si(100) substrates from metal organic precursor solutions. Two different types of substrates were used in this study. It was concluded that the substrates were very effective on the structural and electrical properties of the films. The difference observed in the electrical properties of the films prepared on different substrates was explained by the difference in the crystallinity, (111) dominant orientation and grain size of the substrates. The films prepared at various temperatures from 650°C down to 450°C have all displayed full (111) orientation. The remnant polarisation of the PZT film fabricated at 650°C was 42 µC/cm² whereas remnant polarisation of the film annealed at 450°C was > 15 µC/cm² which was still high enough for practical applications.

Keywords: PZT thin films; electrical properties; ferroelectrics; lead zirconate titanate; substrates; sol-gel.

DOI: 10.1504/IJSURFSE.2012.046839

International Journal of Surface Science and Engineering, 2012 Vol.6 No.1/2, pp.24 - 34

Received: 08 May 2021
Accepted: 12 May 2021

Published online: 11 May 2012 *

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