Title: Research on the tool alignment error in fabrication of off-axis paraboloid surfaces by using slow-tool-servo technique

Authors: Yifan Dai; Guipeng Tie; Ziqiang Yin; Chaoliang Guan

Addresses: Department of Mechatronics Engineering, National University of Defense Technology, Changsha, Hunan 410073, China. ' Department of Mechatronics Engineering, National University of Defense Technology, Changsha, Hunan 410073, China. ' Department of Mechatronics Engineering, National University of Defense Technology, Changsha, Hunan 410073, China. ' Department of Mechatronics Engineering, National University of Defense Technology, Changsha, Hunan 410073, China

Abstract: Fabrication of free-form optics in good quality and high efficiency is much demanded as the widely use of free-form surfaces in modern optical systems. Slow-tool-servo technique is able to fabricate free-form optics with sub-micrometric form accuracy and nanometric surface finish in high efficiency, which has broad prospects of application. The tool alignment error is an important factor to work on the form accuracy of free-forms fabricated by slow-tool-servo technique. This paper studies the tool alignment error, presents a quantitative description of tool alignment errors at both feed and height directions by using the concept of the sensitivity function. An off-axis paraboloid workpiece was fabricated, and measure results verified the point of view in the paper. The tool alignment errors at two directions were calculated by surface figure error data to guide the alignment of cutting tool.

Keywords: freeform optics; off-axis paraboloid surfaces; slow-tool-servo; tool alignment error; nanomanufacturing; nanotechnology; freeform surfaces.

DOI: 10.1504/IJNM.2011.042471

International Journal of Nanomanufacturing, 2011 Vol.7 No.3/4, pp.279 - 288

Received: 13 Nov 2010
Accepted: 14 Mar 2011
Published online: 07 Mar 2015 *

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