Title: Performance and limitation of nanomeasuring technology

Authors: Gerd Jaeger, Eberhard Manske, Tino Hausotte

Addresses: Ilmenau University of Technology, P.O. Box 100 565 98684, Ilmenau, Germany. ' Ilmenau University of Technology, P.O. Box 100 565 98684, Ilmenau, Germany. ' Ilmenau University of Technology, P.O. Box 100 565 98684, Ilmenau, Germany

Abstract: The paper describes traceable nanometrology based on a nanomeasuring machine. The high performance of the machine is explained with a metrological analysis. This analysis shows some of today|s limits of the nanopositioning and nanomeasuring engineering. The limits are based, for instance, on the metre definition as redefined in 1983 as well as on the comparison between an iodine-stabilised helium-neon laser and a stabilised helium-neon laser to be stabilised and on the influence of the refractive index of the air. In addition to the stability of the machine|s metrological frame, the realisation of the Abbe comparator principle plays a fundamental role in machine design and represents a significant challenge when being applied in all axes simultaneously. There are various machines for positioning and measuring samples which are based on different working modes: scanning probe mode, mixed scanning mode and sample scanning mode. These modes are analysed with respect to first- and second-order Abbe errors.

Keywords: metrological analysis; working modes; Abbe comparator principle; nanomeasuring technology; nanotechnology; nanometrology; nanopositioning; machine design.

DOI: 10.1504/IJNM.2011.039962

International Journal of Nanomanufacturing, 2011 Vol.7 No.1, pp.54 - 62

Received: 18 Nov 2010
Accepted: 11 Jan 2011

Published online: 28 Feb 2015 *

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