Title: Control of AFM tip wear

Authors: Francesco Marinello, Enrico Savio, Leonardo De Chiffre

Addresses: DIMEG – Department of Innovation in Mechanics and Management, University of Padova, via Venezia 1, I-35131 Padova, Italy. ' DIMEG – Department of Innovation in Mechanics and Management, University of Padova, via Venezia 1, I-35131 Padova, Italy. ' MEK – Department of Mechanical Engineering, Technical University of Denmark, Produktionstorvet, Building 425, Room 219, 2800 Kgs. Lyngby, Denmark

Abstract: Atomic force microscopes can provide extremely high resolution imaging of surfaces; nevertheless due to non-ideal shape and size of the probe tip, distortions are present. The amplitude of these distortions is not constant: in fact, tip shape evolves with time, since physical effects and dynamic interactions produce wear. The possibility of foreseeing tip wear rate is of great help whenever quantitative analyses are needed, reducing the time needed for tip-investigation and allowing for a proper deconvolution operation. In this paper, a new strategy for monitoring and modelling tip wear in contact mode AFM is presented. Evolution of tip shape was observed by reverse imaging of a scanned nanostructured topography, periodically repeated throughout tip lifetime. An algorithm for tip deconvolution is presented in the paper.

Keywords: quantitative nanometrology; precision microscopy; atomic force microscopy; AFM tip wear; tip characterisation; wear control; precision metrology; wear monitoring; modelling; nanotechnology.

DOI: 10.1504/IJPTECH.2011.039464

International Journal of Precision Technology, 2011 Vol.2 No.2/3, pp.289 - 300

Published online: 06 Apr 2011 *

Full-text access for editors Full-text access for subscribers Purchase this article Comment on this article