Title: Precision measurement of micro-lens profile by using a force-controlled diamond cutting tool on an ultra-precision lathe

Authors: K.W. Lee, Y.J. Noh, Y. Arai, Y. Shimizu, W. Gao

Addresses: Department of Nanomechanics, Tohoku University, Aramaki Aza Aoba 6-6-01, Sendai, 980-8579, Japan. ' Department of Nanomechanics, Tohoku University, Aramaki Aza Aoba 6-6-01, Sendai, 980-8579, Japan. ' Department of Nanomechanics, Tohoku University, Aramaki Aza Aoba 6-6-01, Sendai, 980-8579, Japan. ' Mechanical Engineering Research Laboratory, Hitachi, Ltd., Kirihara, Fujisawa, 252-8588, Japan. ' Department of Nanomechanics, Tohoku University, Aramaki Aza Aoba 6-6-01, Sendai, 980-8579, Japan

Abstract: This paper describes surface profile measurement of micro-lenses cut on a cylinder workpiece by a force sensor integrated fast tool control unit (FS-FTC), which consists of a single point diamond cutting tool, a PZT actuator to move the tool, a capacitive displacement sensor to measure the tool displacement, and a piezoelectric force sensor to detect the cutting force along the in-feed direction. After the fabrication, the cutting tool is then employed as a stylus probe for measurement of the micro-lens profile, without removing the workpiece and the cutting tool from the ultra-precision lathe. During the surface profile measurement, the contact force between the cutting tool edge and the micro-lens surface, which is detected by the force sensor of the FS-FTC, is kept constant by servo control of the tool position with the PZT actuator when the scanning motions are generated by the spindle and the slide of the ultra-precision lathe. The measurement principle and measurement results are presented.

Keywords: precision metrology; surface profile measurement; micro-lens; diamond cutting tools; ultra-precision lathes; precision turning; force sensors; PZT actuators; capacitive displacement sensors; tool displacement.

DOI: 10.1504/IJPTECH.2011.039460

International Journal of Precision Technology, 2011 Vol.2 No.2/3, pp.211 - 225

Published online: 06 Apr 2011 *

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