Title: Fatigue and fracture mechanics aspects of LIGA fabricated nickel and Ni-20%Fe microstructures

Authors: John D. Williams

Addresses: Department of Electrical and Computer Engineering, University of Alabama in Huntsville, Huntsville, Alabama 35899, USA

Abstract: This work is used to determine fracture mechanics properties and fatigue life of electroplated nickel and nickel-iron microstructures used in Micro Electro Mechanical Systems (MEMS) applications from published tensile test data. Calculations of the stress intensity factor, the initial crack length of the plastic zone, and predictions of fatigue life for micro structured nickel and Ni-20 %Fe are presented. The goal of this effort is to provide a theoretical approach that will allow for the future development of an industrial standard to predict the fatigue life of MEMS components.

Keywords: LIGA; electroplated nickel microstructure; nickel-iron microstructure; MEMS fatigue; MEMS fracture mechanics; microelectromechanical systems; fatigue life; stress intensity factors; initial crack length; plastic zone.

DOI: 10.1504/IJTAMM.2010.033604

International Journal of Theoretical and Applied Multiscale Mechanics, 2010 Vol.1 No.3, pp.266 - 279

Published online: 07 Jun 2010 *

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