Title: Study on reduction of nano-fluctuations of aerostatic bearing with surface restriction

Authors: Takakazu Kitagawa, Tomoko Hirayama, Takashi Matsuoka, Ryota Mizuno, Masato Kadotani, Hiroki Danjo, Katsumi Sasaki, Hiroshi Yabe

Addresses: Department of Mechanical Engineering, Doshisha University, 1–3 Miyakodani, Tatara, Kyotanabe, Kyoto 610-0394, Japan. ' Department of Mechanical Engineering, Doshisha University, 1–3 Miyakodani, Tatara, Kyotanabe, Kyoto 610-0394, Japan. ' Department of Mechanical Engineering, Doshisha University, 1–3 Miyakodani, Tatara, Kyotanabe, Kyoto 610-0394, Japan. ' Department of Mechanical Engineering, Doshisha University, 1–3 Miyakodani, Tatara, Kyotanabe, Kyoto 610-0394, Japan. ' Department of Mechanical Engineering, Doshisha University, 1–3 Miyakodani, Tatara, Kyotanabe, Kyoto 610-0394, Japan. ' Department of Mechanical Engineering, Doshisha University, 1–3 Miyakodani, Tatara, Kyotanabe, Kyoto 610-0394, Japan. ' Pneumatic Servo Controls Ltd., 2266-22, Anagahora, Shimo-shidami, Moriyama-ku, Nagoya, Aichi 463-0003, Japan. ' Department of Mechanical Engineering, Osaka Electro-Communication University, 18-8 Haccho, Neyagawa, Osaka 572-8530, Japan

Abstract: In our laboratory, a new actuator |pneumatic servo actuator| that consists of aerostatic bearing and pneumatic servo valve has been proposed for ultra precise positioning. The actuator can realise the ultraprecise positioning by controlling inlet air pressure using pneumatic servo valve. However, it has been reported that aerostatic bearings bring on nano-fluctuations of the supported object because of their small damping characteristics. In this paper, the order of nano-fluctuations occurring in the aerostatic bearing and its conditions were investigated, and the design of a new type of bearing that has smaller fluctuations was presented.

Keywords: aerostatic bearings; pneumatic servo actuators; thrust bearings; nanofluctuation; surface restriction; pneumatic servo valves; fluctuations.

DOI: 10.1504/IJSURFSE.2010.030483

International Journal of Surface Science and Engineering, 2010 Vol.4 No.2, pp.111 - 120

Published online: 18 Dec 2009 *

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