Title: Computer-aided design for microelectromechanical systems (MEMS)

Authors: Y.C. Lee, B. McCarthy, J. Diao, Z. Zhang, K.F. Harsh

Addresses: Department of Mechanical Engineering, NSF Centre for Advanced Manufacturing and Packaging of Microwave, Optical and Digital Electronics (CAMPmode), University of Colorado, Boulder, CO 80309-0427, USA. Department of Mechanical Engineering, NSF Centre for Advanced Manufacturing and Packaging of Microwave, Optical and Digital Electronics (CAMPmode), University of Colorado, Boulder, CO 80309-0427, USA. Department of Mechanical Engineering, NSF Centre for Advanced Manufacturing and Packaging of Microwave, Optical and Digital Electronics (CAMPmode), University of Colorado, Boulder, CO 80309-0427, USA. Department of Mechanical Engineering, NSF Centre for Advanced Manufacturing and Packaging of Microwave, Optical and Digital Electronics (CAMPmode), University of Colorado, Boulder, CO 80309-0427, USA. Department of Chemical Engineering, NSF Centre for Advanced Manufacturing and Packaging of Microwave, Optical and Digital Electronics (CAMPmode), University of Colorado, Boulder, CO 80309-0427, USA

Abstract: With the advancements of MEMS foundry services and CAD tools, MEMS devices can be cost-effectively designed and prototyped. Here, four designs that utilise these tools are presented:(1) a flexure design used to reduce the device warpage resulting from the mismatch in thermal expansion coefficients between the device and the substrate for flip-chip bonded MEMS, (2) a digitally positioned micromirror using multiple contacts, (3) a large MEMS flap that achieves uniform movement for fluid mixing, and (4) a 3-dimensional, solder-assembled MEMS device that has been optimised for minimal deviation from the desired assembly angle.

Keywords: computer-aided design; coventor; flexure; microelectromechanical systems; optical MEMS; optimisation; CAD.

DOI: 10.1504/IJMPT.2003.002497

International Journal of Materials and Product Technology, 2003 Vol.18 No.4/5/6, pp.356-380

Published online: 19 Jul 2003 *

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