Title: Characterisation of tribological behaviour of silicon and ceramic coatings under repeated sliding at micro-scale

Authors: H.R. Le, J.A. Williams, J.K. Luo

Addresses: Division of Mechanical Engineering and Mechatronics, University of Dundee, Dundee DD1 4HN, UK. ' Department of Engineering, University of Cambridge, Trumpington Street, Cambridge CB2 1PZ, UK. ' CMRI, The University of Bolton, Deane Road, Bolton BL3 5AB, UK

Abstract: Because of large surface-to-volume ratios and low restoring forces, surface stiction and friction can dominate the performance of Micro-Electro-Mechanical Systems (MEMS) currently being developed. To achieve the functionality and reliability of these devices, tribologists strive to understand the mechanisms of adhesion, friction and wear over a broad range of length scales. This paper presents the design and commission of a simple tribological test rig for the characterisation of MEMS materials from micro-scale to meso-scale. The effects of normal load, environment and various coatings on the friction and wear are explored using this rig.

Keywords: microtribology; silicon; silicon nitride coatings; diamond-like carbon coatings; ceramic coatings; surface stiction; surface friction; microelectromechanical systems; MEMS; adhesion; wear; tribology.

DOI: 10.1504/IJSURFSE.2008.018964

International Journal of Surface Science and Engineering, 2008 Vol.2 No.1/2, pp.1 - 13

Published online: 26 Jun 2008 *

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