Title: Carbon as a MEMS material: micro and nanofabrication of pyrolysed photoresist carbon

Authors: Chunlei Wang, Rabih Zaouk, Benjamin Y. Park, Marc J. Madou

Addresses: Department of Mechanical and Materials Engineering, Florida International University, 10555 W Flagler Street, EC 3463, Miami, FL 33174, USA. ' Department of Mechanical and Aerospace Engineering, University of California, Irvine 4200 Engineering Gateway, Irvine, CA 92697-3975, USA. ' Department of Mechanical and Aerospace Engineering, University of California, Irvine 4200 Engineering Gateway, Irvine, CA 92697-3975, USA. ' Department of Mechanical and Aerospace Engineering, University of California, Irvine 4200 Engineering Gateway, Irvine, CA 92697-3975, USA

Abstract: Carbon, like Si, is an attractive and very versatile engineering material and is available in more structural varieties than Si. Carbon materials are already in use in a wide variety of applications because of their widely differing crystalline structures and properties, which enable very different physical, chemical, mechanical, thermal and electrical uses. Carbon-based Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS), with sizes ranging from millimetre to nanometre, can provide solutions, alone or in combination with Si and other materials for microelectronics, nanoelectronics, sensors, miniaturised power systems, etc. In this review, Carbon-MEMS (C-MEMS) and Carbon-NEMS (C-NEMS) technology based on pyrolysis of patterned photoresist is reviewed. The fabrication process and the most promising applications are introduced.

Keywords: carbon; microelectromechanical systems; MEMS; nanoelectromechanical systems; NEMS; microfabrication; nanofabrication; microbattery; pyrolysis; patterned photoresist.

DOI: 10.1504/IJMTM.2008.016782

International Journal of Manufacturing Technology and Management, 2008 Vol.13 No.2/3/4, pp.360 - 375

Published online: 22 Jan 2008 *

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