Title: Principle and applications of MEMS: a review

Authors: N.P. Mahalik

Addresses: Department of Mechatronics, Gwangju Institute of Science and Technology, 1 Oryong Dong, Buk Gu, Gwangju 500 712, South Korea

Abstract: Design for miniaturisation represents a broad research topic with applications in fundamental physics, chemistry, martial science, computing methods, ultra-precision engineering, fabrication technology and micromachining based on the principles, characterisation, modelling, simulation and state-of-the-art technology. This paper presents a review on the research and developmental aspects of Microelectromechanical Systems (MEMS). MEMS is relatively a recent development which can be used in a variety of industrial as well as consumer product applications where IC-based technology fails. The review will enable the readers to understand the underlying technology, philosophy, concepts, ideas and principles including micromanufacturing, lithography, bulk and surface micromachining, microsensors, microactuators, Microopto Electromechanical Systems (MOEMS), RF MEMS, Nanoelectro Mechanical Systems (NEMS), microfluidics and BioMEMS. Aspects of microsystems in terms of design process, practice and techniques are presented.

Keywords: MEMS; fabrication; integrated circuits; NEMS; LIGA; modelling; microelectromechanical systems; micromanufacturing; lithography; bulk micromachining; surface micromachining; microsensors; microactuators; microoptoelectromechanical systems; MOEMS; RF MEMS; nanoelectromechanical systems; microfluidics; bioMEMS; microsystems.

DOI: 10.1504/IJMTM.2008.016780

International Journal of Manufacturing Technology and Management, 2008 Vol.13 No.2/3/4, pp.324 - 343

Published online: 22 Jan 2008 *

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