Title: Microgroove pattern machined by excimer laser dragging

Authors: Hong Hocheng, Kuan-Yu Wang

Addresses: Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu 30013, Taiwan. ' Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu 30013, Taiwan

Abstract: A laser dragging process to ablate the groove pattern on a Polycarbonate (PC) sheet is analysed in this paper. To accurately predict the machined profile during the dragging process, a model describing the relationship between laser machining parameters and the produced profile is constructed. Based on this model, the produced pattern of multipath cross scanning in various directions can be predicted. This paper presents the results of both experiment and numerical simulation in single and cross dragging. The experimental parameters include the dragging velocity, pulse repetition rate, pulse number, fluence and the height of the mask pattern, the width of the mask pattern. PC material is applied in this study for its excellent ablation characteristics at 248 nm of the wavelength. In the laser dragging, two shapes of masks are used, parabolic shape and triangular shape. The results show the produced profile can be effectively predicted in laser dragging.

Keywords: excimer laser dragging; cross scanning; polycarbonate sheets; KrF; photochemical reaction; microgroove patterns; laser machining; profile prediction.

DOI: 10.1504/IJMTM.2008.016774

International Journal of Manufacturing Technology and Management, 2008 Vol.13 No.2/3/4, pp.241 - 253

Published online: 22 Jan 2008 *

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