Title: Tribological and mechanical properties of DLC film obtained on metal surface by an enhanced and low-cost pulsed-DC discharge

Authors: Vladimir Jesus Trava-Airoldi, Lucia Viera Santos, Luis Francisco Bonetti, Gil Capote, Polyana Alves Radi, Evaldo Jose Corat

Addresses: Instituto Nacional de Pesquisas Espaciais (INPE), Laboratorio Associado de Sensores e Materiais (LAS), Avenida dos Astronautas, 1758 – Sao Jose dos Campos, 12227-010, SP, Brazil. ' Instituto Nacional de Pesquisas Espaciais (INPE), Laboratorio Associado de Sensores e Materiais (LAS), Avenida dos Astronautas, 1758 – Sao Jose dos Campos, 12227-010, SP, Brazil. ' Instituto Nacional de Pesquisas Espaciais (INPE), Laboratorio Associado de Sensores e Materiais (LAS), Avenida dos Astronautas, 1758 – Sao Jose dos Campos, 12227-010, SP, Brazil. ' Instituto Nacional de Pesquisas Espaciais (INPE), Laboratorio Associado de Sensores e Materiais (LAS), Avenida dos Astronautas, 1758 – Sao Jose dos Campos, 12227-010, SP, Brazil. ' Instituto Nacional de Pesquisas Espaciais (INPE), Laboratorio Associado de Sensores e Materiais (LAS), Avenida dos Astronautas, 1758 – Sao Jose dos Campos, 12227-010, SP, Brazil. ' Instituto Nacional de Pesquisas Espaciais (INPE), Laboratorio Associado de Sensores e Materiais (LAS), Avenida dos Astronautas, 1758 – Sao Jose dos Campos, 12227-010, SP, Brazil

Abstract: A new, low-cost, enhanced pulsed-DC PACVD deposition system was designed and tested to evaluate its capacity to produce quality DLC films. The main focus of the study was to attain DLC films with low friction coefficients, low total stress, a high degree of hardness, and very good adherence to the substrates on depositions covering a large area at a high growth rate. A summary of degree of hardness, resulting friction coefficients, deposition rates, total stress, adherence, and structural properties as functions of the pulsed-DC voltage and pulse characteristics are presented in this paper.

Keywords: diamond-like carbon; DLC films; plasma-assisted CVD; chemical vapour deposition; PACVD; pulsed-DC discharge; metal surface; adhesion; tribological properties; mechanical properties; structural properties; friction coefficients; stress;hardness.

DOI: 10.1504/IJSURFSE.2007.016693

International Journal of Surface Science and Engineering, 2007 Vol.1 No.4, pp.417 - 428

Published online: 15 Jan 2008 *

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