Title: MEMS 3D-microtransformer fabrication on PCB using electrodeposition method

Authors: Mohammad Zayed Ahmed; Mohd H.S. Alrashdan; Amir Abu-Al-Aish; Burhanuddin Yeop Majlis

Addresses: Electrical Engineering Department, Engineering Faculty, Al-Hussein Bin Talal University, Ma'an 71111, Jordan ' Electrical Engineering Department, Engineering Faculty, Al-Hussein Bin Talal University, Ma'an 71111, Jordan ' Communications Engineering Department, Engineering Faculty, Al-Hussein Bin Talal University, Ma'an 71111, Jordan ' Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia, Malaysia

Abstract: A rectangular 3D-micro-transformer was designed and fabricated on a printed circuit board using micro electro mechanical system technology. The fabrication process included an electroplated copper coils and an Ni/Fe magnetic core. The 3D-micro transformer is aimed for low frequency applications. The total footprint of the micro transformer is 3.1744 μm². The achieved efficiency in a step-down configuration is 63% in the frequency range of 40 kHz to 600 kHz. The 3D-micro transformer has a stable output voltage and efficiency in this frequency range and can operate in proper way for low frequency application.

Keywords: micro electro mechanical system; MEMS; fabrication; PCB; 3D micro-transformer; electrodeposition.

DOI: 10.1504/IJPELEC.2020.110067

International Journal of Power Electronics, 2020 Vol.12 No.3, pp.317 - 331

Received: 19 Nov 2017
Accepted: 19 May 2018
Published online: 05 Oct 2020 *

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