MEMS 3D-microtransformer fabrication on PCB using electrodeposition method
by Mohammad Zayed Ahmed; Mohd H.S. Alrashdan; Amir Abu-Al-Aish; Burhanuddin Yeop Majlis
International Journal of Power Electronics (IJPELEC), Vol. 12, No. 3, 2020

Abstract: A rectangular 3D-micro-transformer was designed and fabricated on a printed circuit board using micro electro mechanical system technology. The fabrication process included an electroplated copper coils and an Ni/Fe magnetic core. The 3D-micro transformer is aimed for low frequency applications. The total footprint of the micro transformer is 3.1744 μm². The achieved efficiency in a step-down configuration is 63% in the frequency range of 40 kHz to 600 kHz. The 3D-micro transformer has a stable output voltage and efficiency in this frequency range and can operate in proper way for low frequency application.

Online publication date: Mon, 05-Oct-2020

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