Title: The effect of different sputtering parameters on coating thickness and hardness in MoS2 coated films with and without interlayer

Authors: Mehmet Poyraz; Recai Fatih Tunay

Addresses: Department of Mechanical Engineering, Faculty of Engineering, University of Mugla Sıtkı Koçman, 48000 Muğla, Turkey ' Department of Mechanical Engineering, Faculty of Engineering, University of Suleyman Demirel, 32260 Isparta, Turkey

Abstract: The aim of this study is; to examine the effect of different sputtering parameters on coating thickness and hardness in MoS2 films which are deposition of radio frequency (RF) magnetron sputtering method. Therefore, 440C steel substrates are coated with MoS2 thin films which exhibit lubrication as a solid lubricant and low friction characteristic during shear. MoS2 films with no interlayer and (Ti/Cr) with interlayer were deposited on the AISI 440C substrates. During the coating, by changing the deposition parameters such as the substrate deposition temperature and RF sputtering power, steel disc groups which are coated in 15 different deposition parameters were obtained. The thicknesses of the films were measured by using a SEM. The surface topographies were observed at different magnifications. The composition and structure were analysed by energy dispersive spectroscopy (EDS). A nano-indentation system was used to determine the hardness and elesticity modules of the coatings.

Keywords: thin film coating; film hardness and thickness; physical vapour deposition; radio frequency magnetron sputter film coating.

DOI: 10.1504/IJSURFSE.2020.108221

International Journal of Surface Science and Engineering, 2020 Vol.14 No.2, pp.117 - 134

Received: 21 May 2019
Accepted: 18 Oct 2019

Published online: 24 Jun 2020 *

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